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A Digital Deformation Vacuum Gauge with an LC-Generator |
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| Authors: | Korolev I. A. Alekseenko N. N. Porodnov B. T. Sapunov V. A. Savel'ev D. V. |
| Abstract: | The design of a sylphon bellows sensor and the basic circuits of an LC-generator and of a microprocessor unit are presented. An analytical pressure–frequency conversion function and a special method of adjusting the sensor ensure an error of less than 0.05%. The dynamic range is up to 105. The instruments developed cover the ranges 103, 104, and 105 Pa. |
| Keywords: | sylphon bellows sensor LC-generator pressure– frequency conversion |
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