基于PXI平台的MEMS电场传感器自动测试系统的设计

针对MEMS电场传感器的传统测试系统复杂、测试效率低和兼容性差等问题,设计了一种新型电场传感器自动测试系统。该系统基于高度集成的NI PXI平台,采用LabVIEW图形化编程语言,构成了传感器自动测试系统虚拟仪器框架。系统采用集散控制理念,将控制器与操作站分离,实现了对标准电场发生装置的控制、传感器微弱信号的采集与处理、数据的分析与存储等；并且基于数字化相关解调技术,实现了电场传感器对直流电场和交流电场的高精度标定测试。通过实验验证了测试系统工作的稳定,传感器的测试精度小于1%。

Design of MEMS Electric-field Sensor Test System Based on PXI

The traditional electric-field sensor test systems have some disadvantages such as complexity,inefficiency and bad compatibility.This paper designed a new electric-field sensor test system.Based on NI PXI and LabVIEW,virtual instrument system architecture was given by this test system.Based on DCS,the controller and operation station are separated,the standard electric-field controlling,data acquisition and processing can be realized.Based on the technique of correlation detection,it can measure the calibration of electric-field sensor in static and alternating electric field.Through experiments,the test system has been proved to have strong stability and high measuring accuracy less than 1%.