Studies of diamond-like carbon films prepared by ion beam-assisted deposition |
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Authors: | Heng-de Li Xiao-Ming He |
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Affiliation: | (1) Department of Materials Science and Engineering, Tsinghua University, 100084 Beijing, People’s Republic of China |
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Abstract: | Ion beam-assisted deposition offers a novel and unique process to prepare diamond-like carbon (DLC) films at room temperature, with particularly good interface adhesion. This advantage was explored in this study to deposit highly wear-resistant coating on bearing 52100 steel. Both dual ion beam sputtering and ion beam deposition were employed. Various bombarding species and energy were investigated to optimize the process. Raman, X-ray photoelectron and Auger electron spectroscopy were used to characterize the bonding structure of DLC. Extensive experiments were carried out to examine the tribological behaviour of the DLC/52100 system. A metal intermediate layer can help tremendously in wear resistance. The results are optimistic and may lead to useful applications. |
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Keywords: | Diamond-like carbon films ion-beam assisted deposition |
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