| 基于柔顺机构的两自由度微动精密定位平台的分析与设计 |
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| 引用本文： | 田俊,张宪民.基于柔顺机构的两自由度微动精密定位平台的分析与设计[J].机械设计与制造,2009(5). |
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| 作者姓名： | 田俊 张宪民 |
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| 作者单位： | 华南理工大学机械与汽车学院,广州,510640 |
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| 基金项目： | 国家杰出青年科学基金 |
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| 摘 要： | 基于柔性铰链变形原理设计了一种压电驱动的两自由度柔顺机构微动精密定位平台.首先建立了平台的刚度、固有频率和强度的分析模型,通过优化设计得出了平台的最优结构尺寸.利用有限元软件仿真分析验证了设计模型和优化结果的正确性.最后制造了原型样机,进行了实验,对平台进行了标定并分析了平台的定位误差.
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| 关 键 词： | 柔性铰链 精密定位 机构优化 |
Design and analysis of a two degree of freedom micro-positioning stage |
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| TIAN Jun,ZHANG Xian-min.Design and analysis of a two degree of freedom micro-positioning stage[J].Machinery Design & Manufacture,2009(5). |
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| Authors: | TIAN Jun ZHANG Xian-min |
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| Affiliation: | South China University of Technology School of Mechanical Automobile;Guangzhou 510640;China |
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| Abstract: | Based on the deformation principle of flexure hinge,a two degree of freedom micro-positioning stage actuated by PZT is designed. First,a theoretical analysis model of this stage is established. Second,the optimal structure parameters are obtained by the optimization method. Further,the design results are validated by the simulation of Finite Element Analysis software. Finally,prototype of stage is manufactured. Calibration of stage is performed,and error of positioning is analyzed based on the experimental ... |
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| Keywords: | Flexure hinge Precision positioning Mechanism optimization |
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