Fine tuning of surface-acoustic-wave resonator filters with metallisation thickness |
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| Authors: | Haydl W.H. Cross P.S. |
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| Affiliation: | Fraunhofer Gesellschaft, Institut für Angewandte Festk?rperphysik, Freiburg, West Germany; |
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| Abstract: | Two-port surface-acoustic-wave resonator filters with Q factors in excess of 3000 and a sidelobe suppression of 30 dB have been fabricated from yz LiNbO3 with aluminium metallisation. The dispersion of the centre frequency with aluminium thickness has been found to be 70?10 kHz/?m at 35 MHz. The ability to fine tune with metal thickness has been used to compensate inherent substrate inhomogeneities and to fabricate a high-Q factor flat-top filter. |
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