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激光诱导等离子体在金刚石表面沉积金属薄膜
引用本文:罗飞,龙华,胡少六,江超,李波,王又青. 激光诱导等离子体在金刚石表面沉积金属薄膜[J]. 中国激光, 2004, 31(10): 203-1206
作者姓名:罗飞  龙华  胡少六  江超  李波  王又青
作者单位:华中科技大学激光技术国家重点实验室,湖北,武汉,430074
基金项目:湖北省自然科学基金(编号:20000782)资助项目。
摘    要:介绍了一种利用脉冲准分子激光轰击钛(或镍)靶诱导出等离子体从而在金刚石颗粒表面沉积Ti,Ni等金属保护层的新方法。使用抗压强度测定仪测定并比较了金刚石颗粒表面镀敷金属层前后的抗压强度值,使用金相显微镜观察了金刚石镀膜前后的表面微观状态,并利用x射线衍射仪(XRD)测定了沉积在金刚石颗粒表面金属层的组份。结果表明,利用脉冲准分子激光在金刚石颗粒表面镀Ti后其抗压强度显著增加,而且由于脉冲准分子激光轰击金属靶材后诱导的等离子体能量较高,即使在非高温工作情况下也可在金刚石表面生成TiC膜,这大大提高了金属膜层与金刚石颗粒之间的结合紧密度,这种TiC膜层的形成对于延长金刚石锯片的使用寿命具有重大意义。

关 键 词:薄膜物理学 Ti金属薄膜 脉冲激光 金刚石颗粒
收稿时间:2003-05-15

Preparation of Metallic Coating on Surface of Diamond Particles by Pulsed Laser Deposition
LUO Fei,LONG Hua,HU Shao liu,JIANG Chao,LI Bo,WANG You qing. Preparation of Metallic Coating on Surface of Diamond Particles by Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2004, 31(10): 203-1206
Authors:LUO Fei  LONG Hua  HU Shao liu  JIANG Chao  LI Bo  WANG You qing
Abstract:A new technique is introduced to prepare Ti or Ni coatings on diamond particle surfaces as metallic protection layers by the pulsed excimer laser deposition. Compressive strength and the surface form and structure of the uncoated and coated diamond particles are measured and analyzed by a compressive strength meter and a metallograph, respectively. Specific ingredients of the coated metallic films on the diamond particles are determined by X ray diffractometer (XRD) as well. The test results show the compressive strength of the Ti coated diamond particles increases greatly. Furthermore, because the energy of the plasma produced by using the pulsed excimer laser to ablate a metallic target is much higher, TiC film can be formed on the diamond particle even if the ambient temperature is not very high, which can enhance the interface bond strength between the diamond particles and the Ti films. The formation of this type of TiC film is very helpful to prolong the lifetime of diamond saws.
Keywords:thin film physics  Ti thin film  pulsed laser  diamond particles
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