An analytical model of the material removal rate between elastic and elastic-plastic deformation for a polishing process |
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Authors: | Tsann-Rong Lin |
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Affiliation: | (1) Department of Mechanical Manufacturing Engineering, National Formosa University, Hu-Wei, Taiwan, 632, Republic of China |
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Abstract: | This paper develops an analytical model for the material removal rate during specimen polishing. The model is based on the
micro-contact elastic mechanics, micro-contact elastic-plastic mechanics and abrasive wear theory. The micro-contact elastic
mechanics between the pad-specimen surfaces used the Greenwood and Williamson elastic model. The micro-contact elastic-plastic
mechanics between specimen and particle, as well as the micro-contact elastic mechanics between particle and pad, are also
analyzed. The cross-sectional area of the worn groove in the specimen is considered as trapezoidal area. A close-form solution
of material removal rate from the specimen surface is the function of average diameter of slurry particles, pressure, the
specimen/pad sliding velocity, Equivalent Young’s modulus, RMS roughness of the pad, and volume concentration of the slurry
particle. |
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Keywords: | Material removal rate Polishing Micro-contact mechanics |
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