液相等离子沉积非晶态碳膜的试验研究

应用简单的电镀槽，通过阴极/电解液界面前沿气泡鞘的形成而建立辉光放电，促成非晶态碳薄膜在电极表面的沉积。沉积物宏观上分布不均匀，在阴极浸入电解液的末端，由于电流的尖端效应，导致生成物为石墨。而远离末端为正常沉积区，表面平整光滑，生成物为非。晶态碳膜。结论：液相等离子沉积行为可发生在辉光放电条件下的阴极过程，从而可应用于非晶态薄膜如非晶态碳的制备。

Deposition of amorphous carbon thin film by using plasma in liquid phase

Using a simple plating bath, through the formation of a bubble shield just in front of electrode/solution interface, a glow discharge is set up and maintained between electrodes, leading to the deposit of amorphous carbon thin films on the cathode surface. However, the product on the sample tip is graphite, due to point effect. The area far from the tip is normal deposition zone with smooth surface morphology. It can be concluded that amorphous carbon films can be deposited by using plasma in liquid phase through glow discharge set up during a cathode process.