| Fe-Co薄膜与Al2O3 基体相互扩散和相互作用相关的微观结构演变 |
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| 引用本文： | 李致朋,区定容,叶飞.Fe-Co薄膜与Al2O3 基体相互扩散和相互作用相关的微观结构演变[J].稀有金属材料与工程,2021,50(5):1556-1562. |
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| 作者姓名： | 李致朋 区定容 叶飞 |
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| 作者单位： | Zynergy Technology Incorporation, USA Fremont 94538,南方科技大学 材料科学与工程系，广东 深圳 518055,南方科技大学 材料科学与工程系，广东 深圳 518055 |
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| 摘 要： | 利用先进分析透射电子显微镜，检测并系统地研究了磁控溅射Fe-Co薄膜与Al2O3基体之间的相互扩散。结果表明，扩散会形成尖晶石相FeAl2O4，并导致界面层的形成。微观结构表征表明，在界面附近的Fe-Co薄膜中形成了与相互扩散相关的非公度结构。本研究不仅检测到Fe-Co薄膜与蓝宝石基体之间的相互扩散和伴随的新相形成，而且揭示了界面区域相应的微观结构演变，这些结果可能对薄膜的磁学性质有很大的影响。
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| 关 键 词： | Fe-Co合金 相互扩散 界面 微观结构 透射电子显微镜 |
| 收稿时间： | 2020/2/15 0:00:00 |
| 修稿时间： | 2020/2/22 0:00:00 |
Interdiffusion and Interaction Associated Microstructure Evolution Between Fe-Co Thin Film and Al2O3 Substrate |
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| Li Zhipeng,Ou Dingrong and Ye Fei.Interdiffusion and Interaction Associated Microstructure Evolution Between Fe-Co Thin Film and Al2O3 Substrate[J].Rare Metal Materials and Engineering,2021,50(5):1556-1562. |
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| Authors: | Li Zhipeng Ou Dingrong and Ye Fei |
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| Affiliation: | Zynergy Technology Incorporation, Fremont 94538, USA,Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China,Materials Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, China |
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| Abstract: | By advanced analytical transmission electron microscope, an unexpected interdiffusion between magnetron sputtered Fe-Co thin film and Al2O3 substrate was detected and systematically investigated in this study. Results show that a new phase of spinel FeAl2O4 forms, leading to the formation of interfacial layer. Detailed microstructure characterization reveals the interdiffusion associated with incommensurate structure formation near the interface in the Fe-Co thin film. The interdiffusion and accompanied new phase formation between the Fe-Co thin film and sapphire substrate are detected, and the associated microstructure evolution at the interfacial region is discussed, which may considerably influence the thin film magnetic properties. |
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| Keywords: | Fe-Co alloy interdiffusion interface microstructure transmission electron microscope |
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