半导体生产后工序设备中的若干视觉检测与伺服系统设计技术

针对半导体生产后工序设备中的高速高精度检测与控制问题，首先系统分析了芯片质量检测的任务，并提出了相应的视觉检测算法以及程序设计方法。其次讨论了硬件系统的设计问题，提出了送料系统的立体结构和终端执行机构的双四连杆伺服系统设计方法。从而有效地提高了设备的生产速度和灵活性。

Some Vision Based Detection and Servo-system Design Techniques in the Later Process Equipments of Semiconductor Production

Aiming at the high precision and velocity detection and control problems in the later process equipments of semiconductor production, the chips quality detection tasks are first systematically analysed, the corresponding vision based detection algorithms and program design approach are also developed. The design of hardware systems is then discussed. New design approaches for the solid structure of material delivering system and two independent quadrilateral connecting rods of end-actuator are finally proposed. The proposed design can considerably improve the productivity and flexibility of semiconductor production equipments.