| 硅基红外焦平面阵列技术的新进展(Ⅰ) |
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| 引用本文： | 程开富. 硅基红外焦平面阵列技术的新进展(Ⅰ)[J]. 微纳电子技术, 1997, 0(6) |
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| 作者姓名： | 程开富 |
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| 作者单位： | 重庆光电技术研究所 |
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| 摘 要： | 主要介绍以硅为衬底的非本征硅、金属硅化物（Ｐｄ２Ｓｉ，ＰｔＳｉ和ＩｒＳｉ）肖特基势垒红外探测器、ＧｅｘＳｉ１－ｘ／Ｓｉ异质结内光电发射红外探测器、硅基红外图象传感器、硅微测辐射热计等红外探测器焦平面阵列的新进展
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| 关 键 词： | 红外探测器，硅基，红外图象传感器，金属硅化物，微测辐射热计，红外焦平面阵列 |
Recent Development of Silicon Based IRFPA Technology( Ⅰ) |
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| Abstract: | In the paper the recent development of the infrared detector focal plane arrays on silicon substrate including extrinsic silicon,metal silicide (Pd2Si,PtSi and IrSi)Schottky barrier infrared detector,GexSi1-x/Si heterojunction internal photoemission infrared detectors,silicon based infrared image sensors and silicon microbolometer are emphatically described. |
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| Keywords: | Infrared detectors Silicon substrate Infrared image sensors Metal silicide Microbolometer Infrared focal plane arrays(IRFPA) |
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