硅基红外焦平面阵列技术的新进展(Ⅰ) |
| |
引用本文: | 程开富. 硅基红外焦平面阵列技术的新进展(Ⅰ)[J]. 微纳电子技术, 1997, 0(6) |
| |
作者姓名: | 程开富 |
| |
作者单位: | 重庆光电技术研究所 |
| |
摘 要: | 主要介绍以硅为衬底的非本征硅、金属硅化物(Pd2Si,PtSi和IrSi)肖特基势垒红外探测器、GexSi1-x/Si异质结内光电发射红外探测器、硅基红外图象传感器、硅微测辐射热计等红外探测器焦平面阵列的新进展
|
关 键 词: | 红外探测器,硅基,红外图象传感器,金属硅化物,微测辐射热计,红外焦平面阵列 |
Recent Development of Silicon Based IRFPA Technology( Ⅰ) |
| |
Abstract: | In the paper the recent development of the infrared detector focal plane arrays on silicon substrate including extrinsic silicon,metal silicide (Pd2Si,PtSi and IrSi)Schottky barrier infrared detector,GexSi1-x/Si heterojunction internal photoemission infrared detectors,silicon based infrared image sensors and silicon microbolometer are emphatically described. |
| |
Keywords: | Infrared detectors Silicon substrate Infrared image sensors Metal silicide Microbolometer Infrared focal plane arrays(IRFPA) |
本文献已被 CNKI 等数据库收录! |