| 基于压电动力的双级式驱动器 |
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| 引用本文： | 王皓,凌宁. 基于压电动力的双级式驱动器[J]. 压电与声光, 2005, 27(6): 648-650 |
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| 作者姓名： | 王皓 凌宁 |
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| 作者单位： | 1. 电子科技大学,机械电子工程学院,四川,成都,610054;中国科学院光电技术研究所,四川,成都,610209
2. 中国科学院光电技术研究所,四川,成都,610209 |
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| 摘 要： | 采用双级结构，以满足驱动器的多种功能要求。利用压电陶瓷的高响应速度特性，设计出基于动力学惯性粘-滑原理的变换机构，实现驱动的自锁与步进；利用液力放大器对驱动力、位移分辨力加以提高。对双级式驱动器进行了实验研究，结果表明，双级式驱动器具有2～3nm的位移分辨力、不小于200N的驱动力、良好的自锁性能与位置保持精度。
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| 关 键 词： | 驱动器 压电陶瓷 压电马达 纳米 微定位 |
| 文章编号： | 1004-2474(2005)06-0648-03 |
| 收稿时间： | 2004-01-08 |
| 修稿时间： | 2004-01-08 |
A Two-stage Piezoelectric Actuator |
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| WANG Hao,LING Ning. A Two-stage Piezoelectric Actuator[J]. Piezoelectrics & Acoustooptics, 2005, 27(6): 648-650 |
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| Authors: | WANG Hao LING Ning |
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| Abstract: | A two-stage structure was adopted to satisfy multi-function demand on the actuator. In order to get the characteristics of keeping position without any energy cost and actuating by steps, a conversion mechanism was designed as the first stage. It is based on the stick-slip principle and high responding behavior of piezoelectric ceramic. A hydro-amplifier was used as the second stage to enhance actuating force and improve position resolution. The experiment shows that 2-3 nm position resolution, more than 200 N driving force and position-self-keeping function can be attained. |
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| Keywords: | actuator piezoelectric ceramic piezo-motor nanometer micro-positioning |
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