切点约束和探针针尖半径补偿的金刚石刀具刃口钝圆半径求解方法

本文对金刚石刀具刃口钝圆半径求解方法展开研究,以有效提升金刚石刀具刃口锋利度的测量精度。文中分析了原子力显微镜(AFM)扫描探针几何形貌对金刚石刀具刃口锋利度测量结果的影响,并提出了基于切点约束和AFM探针针尖半径补偿的刀具刃口钝圆半径求解方法;讨论了消噪滤波、测量角度误差以及切点分离方法对测量结果的影响;在高精度测量平台上完成了金刚石刀具刃口锋利度测量,并将被测量的刀具用于飞切加工KDP晶体。结果表明:提出的刃口钝圆半径求解方法能够准确求解金刚石刀具的刃口锋利度,测量结果能很好地描述金刚石刀具的刃口锋利程度,可以为金刚石超精密切削加工的选刀和用刀提供有效指导。

Calculating method for circle radius of diamond tool edge based on tangent point constrain and probe tip radius compensation

To increase measuring precision of cutting edge sharpness of diamond tool effectively,a solution method of edge circle radius of diamond tool was researched.Influence of geometrical morphology of scanning probe of Atomic Force Microscope (AFM) on measuring result of cutting edge sharpness of diamond tool was analyzed,and solution method of circle radius of cutting edge based on tangency point constraint and probe tip radius compensation of AFM was proposed.Influence of noise filtering,measuring angle error and separation method of tangency point on measuring result was discussed.Measuring of cutting edge sharpness of diamond tool was completed on ultra-precision measuring platform,and measured tool was used for fly-cutting of KDP crystal.Result indicates that cutting edge sharpness of diamond tool can be accurately solved with proposed method,and measuring result can describe cutting edge sharpness of diamond tool well to provide effective guidance for cutter selection and using of ultra-precision cutting processing of diamond.