| Composition and structure of Ti-C/DLC graded composite films |
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| 作者姓名： | 孙明仁 夏立芳 |
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| 作者单位： | School of Materials Science and Engineering,Harbin Institute of Technology,Harbin 150001,China |
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| 摘 要： |
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Composition and structure of Ti-C/DLC graded composite films |
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| Abstract: | The Ti-C→DLC gradient composite films were characterized systematically.The elemental depth profile and elemental chemical state evolution were determined by X-ray photoelectron spectroscopy (XPS).The transmission electron microscope (TEM) and high-resolution transmission electron microscopy (HRTEM) were used to study the structure of interfacial zone between DLC film and Ti-C layers.Results show that there are composition transition zone between DLC film and either Ti-C layer or steel substrate on condition that pre-deposited Ti layers on the steel substrate then plasma based bias deposited DLC films.In Ti-C graded layer,the chemical state of titanium and carbon are changed gradually.The structures of zone in Ti-C layer near the DLC film is consisted of random oriented nanocrystallines TiC dispersed in amorphous DLC matrix.The structure of the zone between DLC film and Ti-C graded layer is gradually changed too. |
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| Keywords: | gradient composite films DLC films composition structure |
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