Rapid,Controllable Fabrication of Regular Complex Microarchitectures by Capillary Assembly of Micropillars and Their Application in Selectively Trapping/Releasing Microparticles |
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Authors: | Dong Wu Si‐Zhu Wu Shuai Zhao Jia Yao Jiang‐Nan Wang Qi‐Dai Chen Hong‐Bo Sun |
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Affiliation: | 1. State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun, 130012, PR China;2. College of Physics, Jilin University, 119 Jiefang Road, Changchun, 130023, PR China |
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Abstract: | A simple strategy to realize new controllable 3D microstructures and a novel method to reversibly trapping and releasing microparticles are reported. This technique controls the height, shape, width, and arrangement of pillar arrays and realizes a series of special microstructures from 2‐pillar‐cell to 12 cell arrays, S‐shape, chain‐shape and triangle 3‐cell arrays by a combined top down/bottom up method: laser interference lithography and capillary force‐induced assembly. Due to the inherent features of this method, the whole time is less than 3 min and the fabricated area determined by the size of the laser beam can reach as much as 1 cm2, which shows this method is very simple, rapid, and high‐throughput. It is further demonstrated that the ‘mechanical hand’‐like 4‐cell arrays could be used to selectively trap/release microparticles with different sizes, e.g., 1.5, 2, or 3.5 μm, which are controlled by the period of the microstructures from 2.5 to 4 μm, and 6 μm. Finally, the ‘mechanical hand’‐like 4‐cell arrays are integrated into 100 μm‐width microfluidic channels prepared by ultraviolet photolithography, which shows that this technique is compatible with conventional microfabrication methods for on‐chip applications. |
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Keywords: | capillary assembly microarchitectures interference lithography microparticle manipulation |
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