High-speed InGaAlAs-InAlAs MQW directional coupler waveguide switchmodules integrated with a spotsize converter having a lateral taper,thin-film core, and ridge

Fully packaged 2×2 and 4×4 semiconductor optical switch modules are successfully developed by integrating spotsize converters (SSCs) consisting of lateral tapers, thin-film cores, and ridges in InGaAlAs-InAlAs multiple quantum-well (MQW) directional coupler waveguide switches in the 1.55-μm wavelength region. Good reproducibility is obtained for the perfect coupling length of the directional coupler by appropriately designing the ridge width and gap of strip-loaded optical waveguides and by making use of the Cl₂ reactive-ion-beam-etching and successive wet-etching. Since the switching time is sufficiently short (<70 ps, which is limited by the driver speed) for the 4×4 switch module, no bits are lost during a 10-Gb/s switching experiment at a wavelength of 1.55 μm