| 超薄铝膜电导特性的原位测量研究 |
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| 引用本文： | 唐兆麟,黄荣芳,闻立时.超薄铝膜电导特性的原位测量研究[J].金属学报,1996,32(3):308-312. |
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| 作者姓名： | 唐兆麟 黄荣芳 闻立时 |
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| 作者单位： | 中国科学院金属研究所 |
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| 摘 要： | 在真空室内原位测量了磁控溅射超薄铝膜的电阻率和薄膜厚度之间的关系以及各种工艺参数对其影响，薄膜的不同厚度阶段，具有不同的导电特性分析表明：表面和晶界和对传导电子的散射是构成薄膜电阻率尺寸的效应的原因。
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| 关 键 词： | 超薄膜 电导率 尺寸效应 铝膜 原位测量 |
| 收稿时间： | 1996-03-18 |
| 修稿时间： | 1996-03-18 |
IN SITU MEASUREMENT OF ELECTRIC CONDUCTIVITY OF ULTRA THIN Al FILM |
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| TANG Zhaolin,HUANG Rongfang,WEN Lishi.IN SITU MEASUREMENT OF ELECTRIC CONDUCTIVITY OF ULTRA THIN Al FILM[J].Acta Metallurgica Sinica,1996,32(3):308-312. |
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| Authors: | TANG Zhaolin HUANG Rongfang WEN Lishi |
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| Abstract: | The electric conductivity of sputtered ultrathin Al films as a function of thickness has been measured in situ during vacuum deposition process. At different stages of growth, the films have the different electric conductivity characteristics. Therotical analysis showed that surface scattering and grain boundary scattering played a main role in size effect of resistivity. |
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| Keywords: | ultrathin film electric conductivity size effect |
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