| 磁控溅射纳米SnO_2薄膜的气敏特性 |
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| 引用本文： | 林伟,黄世震,黄兆新,陈伟.磁控溅射纳米SnO_2薄膜的气敏特性[J].传感器与微系统,2003,22(1):61-64. |
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| 作者姓名： | 林伟 黄世震 黄兆新 陈伟 |
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| 作者单位： | 福州大学,气敏传感器研究所,福建,福州,350002 |
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| 摘 要： | 采用磁控溅射制备SnO2薄膜气敏元件,测试了气敏元件的性能,研究了SnO2薄膜气敏元件薄膜厚度、元件加热功率和环境温度和湿度对元件的影响,气敏元件具有很好的灵敏度和选择性特性,对其敏感机理进行了探讨。
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| 关 键 词： | 二氧化锡薄膜 气敏元件 性能 |
| 文章编号： | 1000-9787(2003)01-0061-04 |
| 修稿时间： | 2002年8月16日 |
Gas sensing character of nanometer SnO2 film prepared by magnetron sputtering |
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| Abstract: | *"SnO2 film gas sening element was prepared by magnetron sputtering,the influence on the character of gas sensing element was analysed and researched,such as the thickness of film, power of heater,temperature and humidity of circumstance.The element had very well sensitivity and selectivity,the sensitive mechanism was discussed. |
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| Keywords: | SnO_2 film gas sensing element character |
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