| 倾角传感器的温度补偿研究 |
| |
| 引用本文： | 于娜,刘志远,赵佳龙.倾角传感器的温度补偿研究[J].传感器与微系统,2014,33(10):14-16. |
| |
| 作者姓名： | 于娜 刘志远 赵佳龙 |
| |
| 作者单位： | 中国电子科技集团公司第四十九研究所,黑龙江哈尔滨,150001 |
| |
| 摘 要： | 半导体元件参数随温度变化而产生的温度漂移,将导致倾角传感器本身存在测量偏差,影响倾角测量的准确度.介绍了一种温度补偿方法,对基于加速度原理的差分电容式倾角传感器进行了温度补偿.经过试验验证结果表明：这种方法能够实现倾角传感器的温度补偿,在-55～ 85℃温度范围内可将倾角传感器的温漂降低1个数量级,有效地减少了环境温度对倾角传感器性能的影响.
|
| 关 键 词： | 倾角传感器 加速度 温度补偿 |
Research of temperature compensation of inclination sensor |
| |
| YU Na,LIU Zhi-yuan,ZHAO Jia-long.Research of temperature compensation of inclination sensor[J].Transducer and Microsystem Technology,2014,33(10):14-16. |
| |
| Authors: | YU Na LIU Zhi-yuan ZHAO Jia-long |
| |
| Affiliation: | (The 49th Research Institute, China Electronics Technology Group Corporation, Harbin 150001, China ) |
| |
| Abstract: | Temperature drift of parameters of semiconductor elements along with variation of temperature, will cause inclination sensor exists measurement deviation which impact accuracy. Introduce a temperature compensation method which carry out temperature compensation on differential capacitive inclination sensor based on acceleration principle, The test results show that this method can realize temperature compensation of inclination sensor and the temperature drift decline one order of magnitude at the temperature range of -55℃～ 85℃, and effectively reduces impact of environment temperature on characteristics of inclination sensor. |
| |
| Keywords: | inclination sensor acceleration temperature compensation |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
