| 一种电压输出型CMOS集成电容湿度传感器 |
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| 引用本文： | 曹新亮,黄宝瑞.一种电压输出型CMOS集成电容湿度传感器[J].传感器与微系统,2014,33(9):71-73. |
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| 作者姓名： | 曹新亮 黄宝瑞 |
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| 作者单位： | 延安大学物理与电子信息学院,陕西延安,716000 |
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| 基金项目： | 陕西省教育厅资助项目，延安大学自然科学基金重点资助项目 |
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| 摘 要： | 设计一种湿度传感器。该传感器选用聚酰亚胺作为湿度传感器的感湿介质,采用叉指电容式结构以增加感湿灵敏度,以电荷转移电路为微电容测量电路,用0.35μm多晶硅栅进行设计,形成单片集成湿度传感器。整个组成电路均与CMOS工艺兼容。仿真结果表明:在测量激励方波激励下,片上湿度传感器在27℃下模拟显示出较好的直流电压输出特性。
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| 关 键 词： | CMOS兼容工艺 介电常数 湿敏电容器 电荷转移 电压输出 |
A voltage output CMOS integrated capacitive humidity sensor |
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| CAO Xin-liang,HUANG Bao-rui.A voltage output CMOS integrated capacitive humidity sensor[J].Transducer and Microsystem Technology,2014,33(9):71-73. |
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| Authors: | CAO Xin-liang HUANG Bao-rui |
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| Affiliation: | (School of Physics and Electronics Information ,Yan＇ an University, Yan＇ an 716000, China) |
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| Abstract: | A humidity sensor is designed. The sensor use polyimide as humidity sensing medium and interdigitated capacitive structure to increase humidity sensing sensitivity, charge-shift circuit are employed in micro capacitance measurement circuit, use 0.35 μm poly-silicon grating design, fabricate monolighic integrated humidity sensor. Overall circuit is compatible with CMOS technology. Results of simulation show that on chip humidity sensor show good DC voltage output characteristics at 27 ℃ drived by exciting square wave. |
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| Keywords: | CMOS compatible technology dielectric constant humidity sensitive capacitor charge shift voltage output |
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