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| 薄膜反射镜的单电极控制静电成形 | |
| 引用本文： | 安源,金光,齐迎春,孙小伟,蒋宁,艾晨光.薄膜反射镜的单电极控制静电成形[J].光学精密工程,2009,17(8). |
| 作者姓名： | 安源 金光 齐迎春 孙小伟 蒋宁 艾晨光 |
| 作者单位： | 1. 中国科学院,长春光学精密机械与物理研究所,吉林,长春,130033 2. 吉林大学,长春,吉林,130022 3. 长春理工大学,吉林,长春,130028 4. 北京邮电大学,北京,100876 |
| 摘 要： | 考虑薄膜反射镜具有质量轻、柔韧性好、可折叠等优点,研究了由静电拉伸法制备薄膜反射镜的新技术.介绍了薄膜反射镜的静电成形机理,计算了单电极模式下薄膜所受力场,设计了单电极式薄膜反射镜的控制实验.给出了控制成型所需的主要参数,设计了薄膜反射镜的夹持结构和控制电路,并利用刀口仪测量了形成的反射面的焦距.实验结果显示,未通电时薄膜反射镜面形的PV值达到11.14λ, RMS值为1.86λ,在10 000 V的高压下可以形成焦距约为2.1 m的反射镜面.通过Zernike拟合验证了数据的可靠性,结果表明,通过改善夹持结构精度和选取性能优良的薄膜材料,反射镜面形精度可进一步提高. |
| 关 键 词： | 薄膜反射镜 单电极控制 静电拉伸 |
Control of membrane mirror shape by single electrode |
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| AN Yuan,JIN Guang,QI Ying-chun,SUN Xiao-wei,JIANG Ning,AI Chen-guang.Control of membrane mirror shape by single electrode[J].Optics and Precision Engineering,2009,17(8). | |
| Authors: | AN Yuan JIN Guang QI Ying-chun SUN Xiao-wei JIANG Ning AI Chen-guang |
| Affiliation: | AN Yuan1,JIN Guang1,QI Ying-chun2,SUN Xiao-wei3,JIANG Ning1,AI Chen-guang4(1.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China,2.Jilin University,Changchun 130022,3.Changchun University of Science and Technology,Changchun 130028,4. Beijing University of Posts and Telecommunications,Beijing 100876,China) |
| Abstract: | Electrostatic stretching is a new technique developed in recent years for fabricating membrane mirrors with light,good flexible and collapsible properties. Based on the electrostatic shaping principle of a membrane mirror,the force field of the stretched membrane was calculated by a single electrode mode,and the support structure of the membrane and its control circuit were designed. Then,several kind of technological parameters for controlling membrane shape were given and the focus of reflective surface o... |
| Keywords: | membrane mirror controlled with single electrode electrostatic stretching |
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