基于压电力显微镜的铌酸锂电畴稳定性研究

研究了Z切700 nm厚的单晶铌酸锂(LiNbO₃)薄膜电畴的调控方法。利用X射线衍射仪(XRD)和原子力显微镜(AFM)对单晶LiNbO₃薄膜的晶向和形貌进行了表征,并通过外加电场对单晶LiNbO₃薄膜电畴进行调控。研究结果表明,该LiNbO₃薄膜具有单一的(006)衍射峰,表面光滑、粗糙度低(均方根粗糙度小于1 nm)。通过外加电场和预设电畴图案对LiNbO₃电畴进行精准调控,并测试了电畴稳定性。测试结果显示,调控后的电畴在温度为25~150℃内处于稳定状态,且在30 d内保持稳定,未发生弛豫现象。该研究为LiNbO₃电畴工程器件的研发和应用提供了重要的技术支撑。

Study of Lithium Niobate Domain Stability Based on Piezoresponse Force Microscope

The modulation methods of the domain of Z-cut single crystal lithium niobate(LiNbO₃)thin films with a thickness of 700 nm were studied.By using X-ray diffractometer(XRD)and atomic force microscope(AFM),the crystal orientation and the morphology of the single crystal LiNbO₃thin film were characterized.The domain of the single crystal LiNbO₃thin film was modulated by the external electric field.The results show that the LiNbO₃thin film has a single(006)diffraction peak,a smooth surface and low roughness(the root mean square roughness is less than 1 nm).The domain of LiNbO₃was accurately modulated with the external electric field and the preinstalled domain pattern,and the stability of the domain was tested.The test results show that the modulated domain remains a stable state at 25-150℃.And no relaxation phenomenon has occurred within 30 d.This research provides an important technical support for the development and application of LiNbO₃domain engineering devices.