| 石英晶体横向场激励压电传感器的频率温度特性 |
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| 引用本文： | 马廷锋,张超,张志甜,王文炎,冯冠平. 石英晶体横向场激励压电传感器的频率温度特性[J]. 仪表技术与传感器, 2009, 0(Z1) |
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| 作者姓名： | 马廷锋 张超 张志甜 王文炎 冯冠平 |
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| 作者单位： | 1. 清华大学精密仪器与机械学系,北京,100084
2. 深圳清华大学研究院信息与光机电研究所,广东深圳,518057 |
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| 基金项目： | 深圳市"双百人才"计划 |
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| 摘 要： | 为分析石英晶体横向场激励(lateral-field-excitation, LFE)压电传感器的频率温度特性,文中在厚度场激励(Thick-field-excitation, TFE)压电传感器计算频率温度系数方法基础上,增加一个电场方向的自由度,推导计算LFE压电传感器频率温度系数的公式,并使用该公式计算常用Y旋转切石英晶体横向场激励传感器的一阶、二阶和三阶温度系数,并将其与不考虑压电效应、厚度场激励的2种情况进行比较.通过计算发现,石英晶体在3种不同情况下的频率温度特性曲线基本重合,AT切和BT切石英晶体LFE压电传感器具有零温度系数.
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| 关 键 词： | 石英 横向场激励 压电传感器 频率温度特性 |
Frequency-temperature Characteristics of Quartz Lateral-field-excitation Piezoelectric Sensors |
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| MA Ting-feng,ZHANG Chao,ZHANG Zhi-tian,WANG Wen-yan,FENG Guan-ping. Frequency-temperature Characteristics of Quartz Lateral-field-excitation Piezoelectric Sensors[J]. Instrument Technique and Sensor, 2009, 0(Z1) |
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| Authors: | MA Ting-feng ZHANG Chao ZHANG Zhi-tian WANG Wen-yan FENG Guan-ping |
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| Abstract: | In order to study the frequency-temperature characteristics of quartz LFE piezoelectric sensors,this paper introduced electric field angle to the frequency-temperature coefficient calculation method of TFE piezoelectric sensors,and deduced the calculation formula of frequency-temperature coefficient for LFE piezoelectric sensors. With this formula, the first, second and third frequency-temperature coefficients of Y rotated cut quartz LFE piezoelectric sensors were calculated, and compared to the coefficients of quartz neglecting piezoelectricity and quartz TFE piezoelectric sensors. The frequency-temperature coefficient curves of quartz LFE piezoelectric sensors in three different conditions are almost uniform. The AT and BT cut quartz LFE piezoelectric sensors also have zero frequency-temperature coefficients. |
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| Keywords: | quartz lateral-field-excitation piezoelectric sensor frequency-temperature characteristics |
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