| 新型MEMS微针设计及其力学性能 |
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| 引用本文： | 孙潇,贾书海,朱军,李以贵. 新型MEMS微针设计及其力学性能[J]. 半导体学报, 2007, 28(1): 113-116 |
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| 作者姓名： | 孙潇 贾书海 朱军 李以贵 |
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| 作者单位： | 1. 西安交通大学理学院,光信息科学与技术系,西安,710049
2. 上海交通大学微纳米科学技术研究院,上海,200030 |
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| 基金项目： | 国防重点实验室基金，教育部跨世纪优秀人才培养计划，国家自然科学基金 |
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| 摘 要： | 描述了三种新型MEMS微针的结构设计及制备方法.针对微针的实际使用要求,对微针的固体力学性质及微通道内液体的流动情况进行了理论分析和数值模拟.结果表明,所设计的三种微针的强度可以保证安全地进行皮肤注射,且适于进行药剂的微量传输.
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| 关 键 词： | 微电子机械系统 微针 药物传输 有限元 |
| 收稿时间： | 2015-08-18 |
| 修稿时间： | 2006-08-04 |
Design and Mechanical Characteristics of Novel MEMS Microneedles |
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| Sun Xiao, Jia Shuhai, Zhu Jun, Li Yigui. Design and Mechanical Characteristics of Novel MEMS Microneedles[J]. Journal of Semiconductors, 2007, In Press. Sun X, Jia S H, Zhu J, Li Y G. Design and Mechanical Characteristics of Novel MEMS Microneedles[J]. Chin. J. Semicond., 2007, 28(1): 113.Export: BibTex EndNote |
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| Authors: | Sun Xiao Jia Shuhai Zhu Jun Li Yigui |
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| Affiliation: | Department of Optical Information Science and Technology,School of Science,Xi’an Jiaotong University,Xi’an 710049,China;Department of Optical Information Science and Technology,School of Science,Xi’an Jiaotong University,Xi’an 710049,China;Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200030,China;Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200030,China |
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| Abstract: | Three novel MEMS microneedles are designed and fabricated.Aiming at practical applications,the mechanical characteristics of the microneedles and process of fluid flowing through the microchannels are studied through both theoretical analysis and numerical simulation with the finite element method.The results show that the microneedles designed here are strong enough to guarantee safe injection through skin,and they are suitable for delivering drugs in micro-volumes. |
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| Keywords: | MEMS microneedle drug delivery finite element method |
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