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掺Al的纳米Si-SiO2复合薄膜的光学非线性特性
引用本文:郭亨群,杨琳琳,王启明. 掺Al的纳米Si-SiO2复合薄膜的光学非线性特性[J]. 半导体学报, 2007, 28(5): 640-644
作者姓名:郭亨群  杨琳琳  王启明
作者单位:1. 华侨大学信息科学与工程学院,泉州,362011
2. 中国科学院半导体研究所,北京,100083
摘    要:采用时间分辨四波混频方法,用钛宝石飞秒激光器测量了掺Al的纳米Si-SiO2复合薄膜的光学非线性特性.得到薄膜非共振三阶非线性极化系数为1.0×10-10esu,弛豫时间为60fs.分析认为薄膜的光学非线性增强来源于SiO2镶嵌的纳米Si中电子的量子限制效应,而不是来源于Al杂质,这是因为Al易被氧化,薄膜中没有形成Al团簇.

关 键 词:纳米Si  复合薄膜  三阶非线性  时间分辨四波混频
收稿时间:2015-08-18
修稿时间:2007-03-06

Nonlinear Optical Properties of Al-Doped nc-Si-SiO2 Composite Films
Guo Hengqun, Yang Linlin, Wang Qiming. Nonlinear Optical Properties of Al-Doped nc-Si-SiO2 Composite Films[J]. Journal of Semiconductors, 2007, In Press. Guo H Q, Yang L L, Wang Q M. Nonlinear Optical Properties of Al-Doped nc-Si-SiO2 Composite Films[J]. Chin. J. Semicond., 2007, 28(5): 640.Export: BibTex EndNote
Authors:Guo Hengqun  Yang Linlin  Wang Qiming
Affiliation:College of Information Science and Engineering,Huaqiao University,Quanzhou 362021,China;College of Information Science and Engineering,Huaqiao University,Quanzhou 362021,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
Abstract:The nonlinear optical properties of Al-doped nc-Si-SiO2 composite films have been investigated using the time-resolved four-wave mixing technique with a femtosecond laser.The off-resonant third-order nonlinear susceptibility is observed to be 1.0×10-10 esu at 800nm.The relaxation time of the optical nonlinearity in the films is as short as 60fs.The optical nonlinearity is enhanced due to the quantum confinement of electrons in Si nanocrystals embedded in the SiO2 films.The enhanced optical nonlinearity does not originate from Al dopant because there are no Al clusters in the films.
Keywords:Si nanocrystals  composite films  third-order nonlinearity  time-resolved four-wave mixing
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