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在短脉冲激光作用下薄膜的损伤机制
引用本文:夏志林,邵建达,范正修.在短脉冲激光作用下薄膜的损伤机制[J].材料研究学报,2006,20(6):581-586.
作者姓名:夏志林  邵建达  范正修
作者单位:中国科学院上海光学精密机械研究所,上海,201800;中国科学院研究生院,北京,100080;中国科学院上海光学精密机械研究所,上海,201800
摘    要:计算了不同材料的能带带隙、初始电子密度、激光波长和激光脉宽等参效对薄膜的抗激光损伤闭值的影响,研究了在不同脉冲宽度激光作用下多光子离化和雪崩离化两种损伤机制的竞争.结果表明,在以平均电子能量不变为特征的雪崩电离的建立期间,光电离速度影响初始电子的浓度,从而影响雪崩电离和光电离之间的竞争.激光脉冲的宽度越大,雪崩电离对电子发展的贡献越大,而多光子离化的贡献越小.

关 键 词:材料科学基础学科  薄膜  激光诱导损伤  联合损伤机制  损伤阈值
文章编号:1005-3093(2006)06-0581-06
收稿时间:08 16 2005 12:00AM
修稿时间:07 10 2006 12:00AM

Mechanism of short pulse laser induced damage in dielectric films
XIA Zhilin,SHAO Jianda,FAN Zhengxiu.Mechanism of short pulse laser induced damage in dielectric films[J].Chinese Journal of Materials Research,2006,20(6):581-586.
Authors:XIA Zhilin  SHAO Jianda  FAN Zhengxiu
Affiliation:1.Shanghai Institution of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800 ;2.Graduate School, Chinese Academy of Sciences, Beijing 100080
Abstract:When band gap energy of materials is larger than photon energy, the electronic number density can be described by the Forkker-Planck function. The combination of avalanche ionization and photo ionization mechanisms had been considered and it had been taken as laser induced damage mechanism of films. The damage threshold affected by band gap, initial electronic density, laser wavelength, and pulse width had been investigated. Evaluating results indicate that during the course of stable avalanche ionization establishment which is characterized by the invariable average electronic energy, the electronic number generated by photo ionization can evidently affect the competition between avalanche ionization mechanism and photo ionization mechanism. When laser pulse width increases, avalanche ionization contributes more and photo ionization contributes less to cause films damage.
Keywords:foundational discipline in materials science  films  laser induced damage  combination mechanism  threshold
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