| 卤素原子在化学气相淀积金刚石薄膜过程中的作用 |
| |
| 引用本文： | 刘志杰,张卫,万永中,王季陶. 卤素原子在化学气相淀积金刚石薄膜过程中的作用[J]. 高技术通讯, 1998, 8(6): 43-46 |
| |
| 作者姓名： | 刘志杰 张卫 万永中 王季陶 |
| |
| 作者单位： | 复旦大学电子工程系CVD研究室,上海,200433 |
| |
| 基金项目： | 863计划,国家自然科学基金 |
| |
| 摘 要： | 根据非平衡热力学耦合模型计算得到了碳氢氟和碳氢氯体低压金刚石生长的非平衡定态相图，计算与大量实验事实符合良好。
|
| 关 键 词： | 卤素 化学气相淀积 金刚石 薄膜 非平衡热力学 |
The Functions of Halogen in CVD Diamond Thin Film Deposition Process |
| |
| Liu Zhijie,Zhang Wei,Wan Yongzhong,Wang Jitao. The Functions of Halogen in CVD Diamond Thin Film Deposition Process[J]. High Technology Letters, 1998, 8(6): 43-46 |
| |
| Authors: | Liu Zhijie Zhang Wei Wan Yongzhong Wang Jitao |
| |
| Abstract: | Non equilibrium stationary phase diagrams for C H F and C H Cl system diamond growth are calculated based on the non equilibrium thermodynamic coupling model. The phase diagrams coordinate well with quantities of experimental results published in recent years, therefore can guide the experimental research on diamond growth. Also, the functions of halogen atoms in CVD diamond deposition process are discussed in detail in this paper. |
| |
| Keywords: | Halogen Chemical vapor deposition Diamond |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
