Bench-top setup for validation of real time, digital periodic error correction |
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Authors: | Tony L. Schmitz Lonnie Houck III David Chu Lee Kalem |
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Affiliation: | aUniversity of Florida, 237 MAE-B, Gainesville, FL 32611, Unites States;bAgilent Technologies Inc., P.O. Box 58059, Santa Clara, CA 95052, United States |
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Abstract: | This paper provides experimental validation of the digital first-order periodic error reduction scheme described by Chu and Ray. A bench-top setup of a single-pass, heterodyne Michelson interferometer, designed to minimize common error contributors such as Abbe, dead path and environment, is described. Linear, reciprocating motion generation is achieved using a parallelogram, leaf-type flexure. Periodic error amplitude is varied through independent rotation of a half wave plate and polarizer. Experimental results demonstrate that the correction algorithm can successfully attenuate first-order error to sub-nm levels for a wide range of frequency mixing conditions. |
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Keywords: | Interferometry Heterodyne Displacement Nonlinearity Cyclic |
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