| 变频法纳米级润滑膜厚度测量研究 |
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| 引用本文： | 雒建斌 黄平. 变频法纳米级润滑膜厚度测量研究[J]. 润滑与密封, 1994, 0(1): 27-30,15 |
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| 作者姓名： | 雒建斌 黄平 |
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| 作者单位： | 清华大学摩擦学国家重点实验室 |
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| 摘 要： | 采用平垫层与单色仪分频相结合的方法，得到了不同波长干涉图像。经过图像处理，使按此原理设计的ＮＧＹ－１型膜厚测量仪实现了纳米量级的膜厚测量。并对测量仪进行了精度分析和实际测试。
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| 关 键 词： | 光干涉 润滑膜 纳米级 膜厚测量 |
Study on the Nanometer Film Thickness Measurement by Changing Light Wave Length |
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| Luo Jianbin Huang Ping Zou Qian Wen Shizhu. Study on the Nanometer Film Thickness Measurement by Changing Light Wave Length[J]. Lubrication Engineering, 1994, 0(1): 27-30,15 |
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| Authors: | Luo Jianbin Huang Ping Zou Qian Wen Shizhu |
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| Affiliation: | National Tribology Laboratory |
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| Abstract: | In this paper oil film thickness are measured from the interference fringe maps with different light wave length by using a flat layer which can replace oil film and a monochromator which can put the light into monochromic one. A measuring instrument, NGY-1, was designed to measure sub-micrometer and nanometer film. Then the precision of the instrument was analysed. |
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| Keywords: | interference Nonochromic nanometer film thickness measurement |
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