| 小波变换及其在MEMS谐振器运动轨迹的特征提取中的应用 |
| |
| 引用本文： | 金翠云,栗大超,靳世久,冯亚林,李一博,郝一龙.小波变换及其在MEMS谐振器运动轨迹的特征提取中的应用[J].光学精密工程,2004,12(3):282-286. |
| |
| 作者姓名： | 金翠云 栗大超 靳世久 冯亚林 李一博 郝一龙 |
| |
| 作者单位： | 天津大学,精密测试技术及仪器国家重点实验室,天津,300072;北京大学微电子学研究院,北京,100871 |
| |
| 基金项目： | 863"高技术研究发展计划资助(2002AA404090) |
| |
| 摘 要： | 为测量微电机械系统(MEMS)谐振器的动态特性参数,根据MEMS谐振器运动图像的特点,将小波变换应用于MEMS谐振器运动轨迹的特征提取中.基于模糊图像合成技术,利用小波变换对MEMS谐振器的模糊运动图像进行了增强及降噪处理,并结合传统的图像处理方法,提取MEMS谐振器的运动轨迹,最终获得了MEMS谐振器的特性参数,从而可为MEMS器件的设计提供重要参考.实验结果表明,利用小波变换的方法获得了更好的测量精度,测量重复性误差为100nm.
|
| 关 键 词： | MEMS谐振器 特征提取 小波变换 模糊图像 图像增强 图像降噪 |
| 文章编号： | 1004-924X(2004)03-0282-05 |
| 收稿时间： | 2003/12/15 |
| 修稿时间： | 2003年12月15 |
Wavelet transform and its application in extraction of micro-resonator motion track features |
| |
| JIN Cui-yun,LI Da-chao,JIN Shi-jiu,FENG Ya-lin,LI Yi-bo,HAO Yi-long anjin University,Tianjin ,China.Wavelet transform and its application in extraction of micro-resonator motion track features[J].Optics and Precision Engineering,2004,12(3):282-286. |
| |
| Authors: | JIN Cui-yun LI Da-chao JIN Shi-jiu FENG Ya-lin LI Yi-bo HAO Yi-long anjin University Tianjin China |
| |
| Affiliation: | JIN Cui-yun~1,LI Da-chao~1,JIN Shi-jiu~1,FENG Ya-lin~2,LI Yi-bo~1,HAO Yi-long~2 anjin University,Tianjin 300072,China, 2. Institute of Microelectronics,Peking University,Beijing 100871,China) |
| |
| Abstract: | According to the characteristics of micro-resonator motion images, wavelet transform is used to extract the micro-resonator motion track features. Based on the blur image synthetic technique, wavelet transform was applied to enhance and abate noise of blur micro-resonator motion images, while the traditional image processing method is used to extract the motion track features, and finally the natural parameter of micro-resonator was acquired as important reference for MEMS design. In comparison with traditional image processing method, wavelet transform method has better measurement resolution, and its measurement repetition error is 100 nm. |
| |
| Keywords: | MEMS resonator wavelet transform blur image image enhancement noise reduction |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《光学精密工程》浏览原始摘要信息 |
|
点击此处可从《光学精密工程》下载全文 |
|
