| 一种新型MEMS双稳态微电磁驱动器的研究 |
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| 引用本文： | 张晓鹏,戴旭涵,苗小丹,丁桂甫,赵小林.一种新型MEMS双稳态微电磁驱动器的研究[J].传感器与微系统,2009,28(6):117-120. |
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| 作者姓名： | 张晓鹏 戴旭涵 苗小丹 丁桂甫 赵小林 |
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| 作者单位： | 上海交通大学,微米/纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海,200240 |
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| 基金项目： | 国家自然科学基金资助项目，国家"863"计划资助项目 |
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| 摘 要： | 介绍了一种新型MEMS双稳态微电磁驱动器，通过理论分析和有限元分析工具Ansys对器件的结构参数进行了优化设计，并证明了设计的可行性。利用金属基表面微加工技术与体硅微加工技术成功制作出这种驱动器，并对其弹性平台的弹性系数进行了标定，对驱动器的双稳态进行了调试。结果表明：此驱动器具有良好的双稳特性，响应时间短（约10ms）的特点。
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| 关 键 词： | 微机电系统 电磁驱动 微电铸 湿法腐蚀 |
Study on new type MEMS bi-stable electromagnetic actuator |
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| ZHANG Xiao-peng,DAI Xu-han,MIAO Xiao-dan,DING Gui-fu,ZHAO Xiao-lin.Study on new type MEMS bi-stable electromagnetic actuator[J].Transducer and Microsystem Technology,2009,28(6):117-120. |
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| Authors: | ZHANG Xiao-peng DAI Xu-han MIAO Xiao-dan DING Gui-fu ZHAO Xiao-lin |
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| Affiliation: | ( National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory for Thin Film and Microfabrication of Education Ministry, Shanghai Jiaotong University, Shanghai 200240, China) |
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| Abstract: | A new type MEMS bi-stable electromagnetic actuator is presented.The parameters of the device are optimized by theoretical analysis and Ansys.The feasibility of the design is also proved.The bulk silicon micromachining and metal-based surface micromachining technology is used to fabricate this actuator.The elasticity coefficient of the device is measured,and so is the bi-stable characteristic of the MEMS micro-magnetic actuator.The results show that the device has good performance of bi-stable actuation,and the response time is short(about 10 ms). |
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| Keywords: | MEMS electromagnetic actuator micro-electroplating wet etching |
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