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GaAs MQW modulators integrated with silicon CMOS |
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| Authors: | Goossen KW Walker JA D'Asaro LA Hui SP Tseng B Leibenguth R Kossives D Bacon DD Dahringer D Chirovsky LMF Lentine AL Miller DAB |
| Affiliation: | AT&T Bell Labs., Holmdel, NJ; |
| Abstract: | We demonstrate integration of GaAs-AlGaAs multiple quantum well modulators to silicon CMOS circuitry via flip-chip solder-bonding followed by substrate removal. We obtain 95% device yield for 32×32 arrays of devices with 15 micron solder pads. We show operation of a simple circuit composed of a modulator and a CMOS transistor |
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