| 空间用TiOx光学薄膜的生长机理 |
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| 引用本文： | 孙璐.空间用TiOx光学薄膜的生长机理[J].电源技术,2008,32(12). |
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| 作者姓名： | 孙璐 |
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| 作者单位： | 中国电子科技集团公司第十八研究所,天津,300381 |
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| 摘 要： | 论述了TiOx膜的生长机理,详细研究了在电子束加热真空蒸镀膜的过程,蒸汽分压、衬底温度对膜性能的影响。讨论了通过高温高真空蒸镀的方法制备出双层增透膜TiOx/SiOy、TiOx/YOy和TiOx/AlOy,通过应用双层增透膜,太阳电池的短路电流提高36%～48%(硅太阳电池的短路电流提高近48%,砷化镓太阳电池提高近36%)。
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| 关 键 词： | 光学薄膜 空间太阳电池 增透膜 短路电流 |
Growth mechanism of the TiOx optics film for space |
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| SUN Lu.Growth mechanism of the TiOx optics film for space[J].Chinese Journal of Power Sources,2008,32(12). |
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| Authors: | SUN Lu |
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| Abstract: | The mechanism of the TiOx film growth was discussed. The process of the vacuum evaporation film while the electron beam for heating up, and the influence of steam partial pressure, substrate temperature on the performance of membrane were studied in detail. The preparation of double layers antireflection film TiOx/SiOy, TiOx/YOy, and TiOx/AlOy through high temperature high vacuum evaporation film were discussed. Because of the application of double layers anti- reflection film, the short circuit of the solar cells was improved about 36%- 48%(the short circuit of the silicon solar cell was improved near 48%, GaAs solar cell near 36% ). |
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| Keywords: | optics film space solar cell anti- reflection film short circuit |
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