| 钛酸钡系薄膜的制备方法、性质及应用 |
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| 引用本文： | 翟学良,杨芙丽,明常鑫,高涛.钛酸钡系薄膜的制备方法、性质及应用[J].无机盐工业,2004,36(4):5-8. |
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| 作者姓名： | 翟学良 杨芙丽 明常鑫 高涛 |
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| 作者单位： | 1. 河北师范大学实验中心,河北,石家庄,050016
2. 石家庄化肥厂 |
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| 摘 要： | 综述了制备钛酸钡系薄膜的各种方法，如：溶胶-凝胶法、有机金属化学气相沉积法、射频磁控溅射法、脉冲激光沉积法等，其中主要对溶胶-凝胶法和射频磁控溅射法的制备原理及工艺特点进行了讨论。介绍了钛酸钡薄膜的性质和掺杂后(主要是锶掺杂)对薄膜电性能的影响，对它们的应用现状进行了概括，并对钛酸钡系薄膜的发展趋势做了展望。
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| 关 键 词： | 钛酸钡 薄膜 制备 |
| 文章编号： | 1006-4990(2004)04-0005-04 |
| 修稿时间： | 2004年4月6日 |
Preparations,properties and applications of BaTiO3 - based thin film |
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| Zhai Xueliang.Preparations,properties and applications of BaTiO3 - based thin film[J].Inorganic Chemicals Industry,2004,36(4):5-8. |
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| Authors: | Zhai Xueliang |
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| Affiliation: | Zhai Xueliang~ |
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| Abstract: | The preparation methods of BaTiO_(3)-based thin film such as Sol-Gel method,metallorganic chemical vapor deposition(MOCVD)method,radio-frequency magnetron sputtering method and pulsed laser deposition method have been summarized.The preparation mechanism and process feature of Sol-Gel and radio-frequency magnetron sputtering methods are mainly discussed.The properties of BaTiO_(3) thin film and the influence of doping(Sr-doped) on the electric performance are also introduced.The current status of application and the development trend of BaTiO_3-based thin film are presented. |
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| Keywords: | BaTiO_(3) thin film preparation |
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