| 针尖扫描原子力显微镜的光点跟踪设计 |
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| 引用本文： | 杨金涛,徐文东. 针尖扫描原子力显微镜的光点跟踪设计[J]. 中国激光, 2006, 33(1): 6-30 |
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| 作者姓名： | 杨金涛 徐文东 |
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| 作者单位： | 中国科学院上海光学精密机械研究所先进激光技术与应用系统实验室,上海,201800 |
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| 摘 要： | 提出了一种用于针尖扫描原子力显微镜(AFM)的光点跟踪设计方案,结构简单,容易实现。设计方案对扫描器的负载能力要求不高,而且能使原子力显微镜实现较大范围的针尖扫描。实验结果表明,采用此光点跟踪设计方案的针尖扫描原子力显微镜能实现最大100μm×100μm范围的扫描,z方向上的误差最大1 nm,能很好地满足大样品扫描的需要。
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| 关 键 词： | 仪器 原子力显微镜 针尖扫描 光点跟踪 |
| 文章编号： | 0258-7025（2006）01-0026-05 |
| 收稿时间： | 2005-04-27 |
| 修稿时间： | 2005-09-06 |
Design of Optical Tracking for Scanned-Cantilever Atomic Force Microscope |
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| YANG Jin-tao,XU Wen-dong. Design of Optical Tracking for Scanned-Cantilever Atomic Force Microscope[J]. Chinese Journal of Lasers, 2006, 33(1): 6-30 |
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| Authors: | YANG Jin-tao XU Wen-dong |
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| Abstract: | A design of optical tracking that can be applied to scanned-cantilever atomic force microscope (AFM) is proposed. The configuration of the design is very simple and can be actualized easily. This design not only can realize large range scanning of AFM, but also does not request the high load ability of the scanner. The experimental results show that the scanned-cantilever AFM adopting the optical tracking technique can realize maxium 100 μm×100 μm scanning area, and the error in z direction is no more than 1 nm, which can meet the requirements of large sample scanning. |
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| Keywords: | instrumentation atomic force microscope scanned-cantilever optical tracking |
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