| 纳米科学和技术的新进展 |
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| 引用本文： | 袁哲俊.纳米科学和技术的新进展[J].工具技术,2004,38(9):3-12,26. |
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| 作者姓名： | 袁哲俊 |
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| 作者单位： | 哈尔滨工业大学 |
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| 摘 要： | 介绍纳米科技几个主要方面的最新研究进展 :纳米级精度的测量 ;扫描隧道显微镜和原子力显微镜 ;超精密加工和原子级加工 ;纳米材料 ;微型机械和微型机电系统 ;微型机械的制造等
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| 关 键 词： | 纳米科技 SPM 纳米材料 微型机电系统 |
New Development of Nano-Science and Nano-Technology |
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| Yuan Zhejun.New Development of Nano-Science and Nano-Technology[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2004,38(9):3-12,26. |
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| Authors: | Yuan Zhejun |
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| Affiliation: | Yuan Zhejun |
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| Abstract: | The new developments of nano-science and nano-technology, including nano-metrology, STM, AFM and their new applications, nano-particles materials and nano-structure materials, micro-machining with SPM, micro-machines and MEMS, micro-robots, micro aerial vehicle, MIMU, micro satellite, technology manufacturing of micro-machines and MEMS, micro machining and LIGA technology is introduced. |
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| Keywords: | nano-technology SPM nano-material MEMS |
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