| Abstract: | ZnO films were prepared by filtered cathodic vacuum arc technique with Zn target at different substrate temperatures. The crystallinity is enhanced with increasing substrate temperature and preferably oriented at (1 0 3) direction when the substrate temperature is higher than 230°C. The PL emission corresponding to the exciton transition at 3.37 eV can be observed at room temperature, which indicates that high-quality films have been obtained by this technique. The Hall mobility, which increases with substrate temperature, is dominated by grain boundary scattering. |
