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弱限制MMI型光功分器
引用本文:尹锐,杨建义,江晓清,王明华.弱限制MMI型光功分器[J].电子学报,2000,28(11):93-95.
作者姓名:尹锐  杨建义  江晓清  王明华
作者单位:浙江大学信息与电子工程学系,杭州 310027;浙江大学硅材料国家重点实验室,杭州 310027
基金项目:国家自然科学基金! (No .696770 1 2 ),国家重点基础研究发展规划项目! (No .G1 9990 331 0 4 ),浙江大学硅材料国家重点实验室开
摘    要:本文采用导模数值计算法对MMI(多模干涉)型光功分器SIE干涉区内的导模进行计算并对输出波导位置进行优化,证明在一定条件的弱限制下器件的插入损耗和输出均匀度均超过强限制的情况,说明MMI型光功分器的制作可以采用方便的湿法刻蚀,在器件成本降低的同时其精度也得到改善.

关 键 词:多模干涉  导模  传播常数  
文章编号:0372-2112(2000)11-0093-03
收稿时间:1999-11-22

Weak Guided MMI Optical Splitter
YIN Rui,YANG Jian-yi,JIANG Xiao-qing,WANG Ming-hua.Weak Guided MMI Optical Splitter[J].Acta Electronica Sinica,2000,28(11):93-95.
Authors:YIN Rui  YANG Jian-yi  JIANG Xiao-qing  WANG Ming-hua
Affiliation:Department of Information Science & Electronics Engineering, Zhejiang University,Hangzhou 310027,China; State Key Laboratory of Silicon Materials,Zhejiang University,Hangzhou 310027,China
Abstract:In this paper we calculate the guided modes in SIE region of the MMI optical splitter by numerical calculation.We prove that the insertion loss and output uniformity of weak guided structure are better than that of the strong confinement,which means that we can fabricate MMI optical splitter using wet etching.That decreases the cost of device and at the same time, improves the device function.
Keywords:multimode interference (MMI)  guided mode  propagate constant
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