硅基微静电马达

本文介绍了硅基微静电马达的设计考虑、制作工艺和测量结果。该马达结构上的改进主要体现在两方面：通过在微马达转子的下面集成光伏器件实现了对马达转速的片内检测，这对于研究微马达动力学和构成ＭＥＭＳ有着重要的意义；利用复合膜牺牲层技术制成了一种锥状轴承，该轴承能够减小马达的摩擦力矩。微静电马达转子直径分１００μｍ和１２０μｍ两种，定子与转子极之间的空气间隙有２μｍ、３μｍ和４μｍ三种。初步测量结果表明该马

Silicon-Based Micro Electrostatic Motors

Some design considerations,fabrication issues and structure improvements of siliconbased micro electrostatic motors are described.On-chip detection of micromotor rotational speed,which is significant for studying micromotor dynamics and constituting MEMS,is realized by integrating photovoltaic devices on silicon substrate beneath the rotors.A cone bearing structure,which reduces the friction,is obtained by use of SiO2/PSG composite sacrificial layer technology.The preliminary measurement results show that the mininum starting voltage of micromotors is 93V and the maximum rotational speed is more than 239 rps at 180V driving voltage.