运动控制算法可重构机制

针对步进扫描光刻机运动控制系统调试和运行,提出了一种运动控制算法可重构的机制,实现运动控制算法和关键参数的在线修改;对比分析了不可重构与可重构运动控制软件的设计流程,指出了可重构的优势;为运动控制代码传输设计了VME总线通道并用FPGA实现总线接口,确保运动控制指令的高速稳定传输;设计了运动控制器运算核心DSP的外部接口和运行方式,确保运动控制算法的可控运行;实验结果表明DSP代码可从上位机下载运行,控制系统能灵活的重构运动控制算法,长时间运行稳定,大大提高了光刻机工件台控制系统调试的工作效率。

Reconfigurable Mechanism of Motion Control Algorithm

Towards the debugging and running of motion control system in stepper scanning lithography,this paper proposed a reconfigurable motion control algorithm mechanism for the online modify of motion control algorithm and key parameters;analyzed the difference of software design processing between reconfigurable system and non-reconfigurable,pointed out the advantages of the reconfigurable system;designed a VME bus channel for motion control codes transmission and used FPGA to design bus interface,to ensure stable high speed transmission of motion control orders;designed the external interface and operation mode of DSP,the core of motion control computing,to ensure the controllable running of motion control algorithms.Experiment results show that DSP code can be downloaded from the host computer;the system is stable and can reconfigure motion control algorithms flexibly,this mechanism greatly improved the efficiency of lithography debugging.