Automated visual inspection: a survey

This paper surveys publications, reports, and articles dealing with automated visual inspection for industry. The references are organized according to their contents: overview and discussions, rationales, components and design considerations, commercially available systems, applications. A number of applications and their inspection methodologies are discussed in detail: the inspection of printed circuit boards, photomasks, integrated circuit chips. Other inspection applications are listed as a bibliography. A list of selectively annotated references in commercially available visual inspection tools is also included.