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Electrical Properties of Indium-Oxide Thin Films Produced by Plasma-Enhanced Reactive Thermal Evaporation |
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| Authors: | Ilin A. S. Matsukatova A. N. Forsh P. A. Vygranenko Yu. |
| Affiliation: | 1.Faculty of Physics, Moscow State University, 119991, Moscow, Russia ;2.National Research Centre “Kurchatov Institute”, 123182, Moscow, Russia ;3.Moscow Institute of Physics and Technology, Department of Nano-, Bio-, Information, and Cognitive Technologies, 141700, Dolgoprudnyi, Moscow region, Russia ;4.CTS-UNINOVA, Quinta da Torre, 2829-516, Caparica, Portugal ; |
| Abstract: | Semiconductors - The structure and electrical properties of transparent indium-oxide thin films produced by plasma-enhanced reactive thermal evaporation at different substrate temperatures are... |
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