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Linear chains of Ge/Si quantum dots grown on a prepatterned surface formed by ion irradiation |
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| Authors: | Smagina Zh. V. Dvurechenskii A. V. Seleznev V. A. Kuchinskaya P. A. Armbrister V. A. Zinovyev V. A. Stepina N. P. Zinovieva A. F. Nenashev A. V. Gutakovskii A. K. |
| Affiliation: | 1.Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia ;2.Novosibirsk State University, Novosibirsk, 630090, Russia ; |
| Abstract: | Semiconductors - The growth of Ge nanoclusters on a prepatterned Si (100) surface formed by imprint lithography in combination with subsequent irradiation with Ge+ ions is studied. The prepatterned... |
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