Abstract: | The paper examines nanocomposite coatings based on TiN and SiCN obtained by plasma-enhanced chemical vapor deposition (PECVD)
using methyltrichlorosilane (MTCS) as one of the precursors. The nanocomposite coatings demonstrate four types of structures
depending on deposition modes: nc-TiN, nc-TiN/a-SiCN, nc-TiNC/nc-TiSi2/a-SiCN, and nc-TiNC/nc-TiCl2/a-SiCN. The nanohardness and elastic modulus of the coatings reach 31 and 350 GPa, respectively. The coatings on substrates
of hard alloys, high-speed steel, and silicon increase the nanohardness of the base from 10 to 100%. The correlation between
the H/E ratio and wear resistance is not observed. The coatings deposited at low radiofrequency powers demonstrate good adhesion
to silicon substrates. It is shown that the use of MTCS as the main precursor allows one to obtain hard and wear-resistant
nanocomposite coatings.
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Translated from Poroshkovaya Metallurgiya, Vol. 47, No. 1–2 (459), pp. 125–133, 2008. |