Preparation of ultrafine zirconium dioxide particles by thermal decomposition of zirconium alkoxide vapour

Ultrafine zirconia particles are produced by thermal decomposition of zirconium tetratertiary butoxide (ZrTB) vapour. The introduction of ZrTB vapour into the cylindrical electric furnace, is achieved by three different methods: (evaporator, pressurized nebulizer and ultrasonic nebulizer). The properties of the fine particles obtained by these methods are mainly analysed by X-ray diffraction and transmission electron microscopy. It is found that ultrafine zirconia particles produced at relatively low temperatures from 600 to 700° C are spherical in the diameter range 0.035 to 0.15 μm and of tetragonal phase. Furthermore, two-component fine particles of zirconia-ilver are generated by putting the silver solid inside the furnace containing alkoxide vapour, and are deposited by inertia on to a glass substrate under low pressure to form films having a thickness of 17 to 33 μm. The electrical characteristics of the films are evaluated, and the conductance of the film is found to increase with the content of the silver component.