Influence of lithium doping on the structural and electrical characteristics of ZnO thin films

Thin films of undoped and lithium-doped Zinc oxide, (Zn_1 − xLi_x)O; x = 0, 0.05, 0.10 and 0.20 were prepared by sol-gel method using spin-coating technique on silicon substrates (111)Pt/Ti/SiO₂/Si)]. The influence of lithium doping on the structural, electrical and microstructural characteristics have been investigated by means of X-ray diffraction, leakage current, piezoelectric measurements and scanning electron microscopy. The resistivity of the ZnO film is found to increase markedly with low levels (x ≤ 0.05) of lithium doping thereby enhancing their piezoelectric applications. The transverse piezoelectric coefficient, e₃₁^? has been determined for the thin films having the composition (Zn_0.95Li_0.05)O, to study their suitability for piezoelectric applications.