激光干涉仪在纳米测量中的典型应用

激光干涉仪具有测量分辨力高、测量结果可溯源等优点，在纳米测量中的应用日益广泛。介绍纳米测量机和低膨胀材料线膨胀系数测量装置中应用的迈克尔逊型激光干涉仪以及在高准确度位移测量装置中应用的法布里-珀罗型激光干涉仪，并结合这些实例对激光干涉仪光学系统设计、测量环境控制、迈克尔逊干涉仪非线性误差补偿以及法布里-珀罗干涉仪量程扩展等方面的关键问题进行分析和总结。所述原则和方法对实现纳米级测量准确度具有重要意义，可为高准确度激光干涉仪的研制及其在纳米测量中的更广泛应用提供技术参考。

Typical applications of laser interferometer in nanometer measurement

Laser interferometer has the advantages of high measurement resolution and traceability of measurement results, and is increasingly widely used in nanometer measurement. The Michelson laser interferometers used in nano-measuring machine and linear expansion coefficient measuring device for low expansion materials, and the Fabry-Perot laser interferometer used in high-precision displacement measuring device are introduced in this paper. Combined with these typical applications , key problems in the interferometer optical system design, measurement environment control, the nonlinear error compensation of Michelson interferometer and the measurement range expansion of Fabry-Perot interferometer are analyzed and summarized. The principles and methods described in this paper are of great significance for the laser interferometer to achieve nanometer measurement accuracy, which can provide technical reference for the development of high-precision laser interferometer and wider applications of laser interferometers in nanometer measurements.