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Annealing High-Voltage 4H-SiC Schottky Diodes Irradiated with Electrons at a High Temperature
Authors:Lebedev  A A  Kozlovski  V V  Levinshtein  M E  Malevsky  D A  Oganesyan  G A  Strel’chuk  A M  Davydovskaya  K S
Affiliation:1.Ioffe Institute, St. Petersburg, Russia
;2.Peter the Great St. Petersburg Polytechnic University, 195251, St. Petersburg, Russia
;
Abstract:Semiconductors - The effect of annealing on the parameters of 4H-SiC Schottky diodes irradiated with electrons at a high temperature is studied for the first time. The electron energy is 0.9 MeV,...
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