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Properties of Compliant Substrates Based on Porous Silicon Formed by Two-stage Etching |
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| Authors: | Seredin P V Len’shin A S Radam Ali Obaid Khuder Abduljabbar Riyad Goloshchapov D L Harajidi M A Arsentyev I N Kasatkin I A |
| Affiliation: | 1.Voronezh State University, 394018, Voronezh, Russia ;2.Ministry of Education/General Directorate of Education in Baghdad, The third Karkh Governorate, Iraq ;3.Ioffe Institute, St. Petersburg, Russia ;4.St. Petersburg State University, 199034, St. Petersburg, Russia ; |
| Abstract: | Semiconductors - Abstract—Our work reports on the influence of etching modes and their combination on the design, microstructural and optical properties of compliant substrates based on... |
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