| 大曲率光学零件面形的空间载频外差干涉术检测 |
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| 引用本文： | 刘贱平,梁丽萍,金世龙,刘光灿.大曲率光学零件面形的空间载频外差干涉术检测[J].红外与激光工程,2009,38(1). |
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| 作者姓名： | 刘贱平 梁丽萍 金世龙 刘光灿 |
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| 作者单位： | 1. 国防科学技术大学,光电科学与工程学院,湖南,长沙,410073
2. 长沙学院,电子与通信工程系,湖南,长沙,410003 |
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| 基金项目： | 国家自然科学基金委与中国工程物理研究院联合基金 |
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| 摘 要： | 光学零件表面面形检测的结果直接影响光学零件的质量,介绍了一种在平面干涉仪上检测大曲率球面光学零件面形的方法,通过对干涉图进行预处理、FFT提取相位、解包裹,并采用Zernike多项式拟合,得到被检球面相对平面的面形函数,与指定的球面相减后,再一次进行Zernike多项式拟合,得到了被检面相对于指定球面的面形函数,由此计算出被检球面的面形误差PV值、RMS值,N与ΔN,并模拟出了用球面干涉仪检测时的干涉条纹.该方法克服了接触检测的缺点,精度高,PV值的标准差σ优于λ/100,RMS值的标准差σ优于λ/700,而且可通过软件设定检测任意大曲率光学零件,为大曲率半径光学零件的检测提供了一种适用的方法.
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| 关 键 词： | 大曲率球面面形检测 空间载频外差干涉术 Zernike多项式 |
Testing large curvature surface of optical element with spatial carrier heterodyne interferometry |
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| LIU Jian-ping,LIANG Li-ping,JIN Shi-long,LIU Guang-can.Testing large curvature surface of optical element with spatial carrier heterodyne interferometry[J].Infrared and Laser Engineering,2009,38(1). |
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| Authors: | LIU Jian-ping LIANG Li-ping JIN Shi-long LIU Guang-can |
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| Affiliation: | 1.College of Optoelectronic Science and Engineer;National University of Defense Technology;Changsha 410073;China;2.Department of Electronics and Communication Engineering;Changsha University;Changsha 410003;China |
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| Abstract: | The quality of optical element is directly influenced by the results of its surface test. A kind of test method of optical surface with large curvature by plane interferometer was studied. The measured surface error relative to the standard plane was obtained by some pivotal techniques such as interference fringe preprocessing, FFT phase distilling, phase unwrapping and the first Zernike polynomial fitting, then it subtracted the standard sphere appointed, so the measured surface error relative to the stand... |
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| Keywords: | Testing of large curvature spherical surface Spatial carrier heterodyne interferometry Zernike polynomial |
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